College of Engineering UC Davis

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Northern California Nanotechnology Center

E-Beam User Level Training Manual

Level 1

  1. Only evaporate Al, Au, other melting metals. (Not Germainum)
  2. Operation only during 8 A.M. - 5 P.M.
  3. May only modify Processes, Not film specifications.
  4. Must have basic understanding of how the beam is controlled to ensure that the beam is centered.

Level 2

  1. All Level 1 requirements.
  2. May evaporate any material accepted into chamber.
  3. Must be able to show an understanding of how to fully control the beam using the sweep controller
  4. Operation only during 8 A.M. - 5 P.M.

Level 3

  1. All Level 2 requirements.
  2. May modify both process and film specifications.
  3. May operate at any time - Standard laboratory rules apply, i.e., a lab partner must be present.

Level 4 - Trainer

  1. All Level 3 requirements.
  2. Must have full understanding of the E-beam and vacuum system.
  3. Must be able to regenerate the cryo-pump.

Level 5 - Superuser

  1. Trains trainers
  2. Must be able to preform minor system repairs including filament and insulator replacement, mirror adjustments, gun cleaning and...
  3. Must know when to call primary repair technician.