Equipment
Research Equipment
Map | Furnaces | Vacuum Systems | Photolithography | Mask Making | Parametric Testing and Measurement | Wet Chemistry | Locater for Manuals
Teaching Lab Equipment
Teaching Vacuum Systems | Teaching Photolithography | Teaching Parametric Testing and Measurement
Map | Locater for Manuals
Master Layout (PDF)
Mechanically accurate master floorplan which implements some (but not all) of the location and naming changes. PDF requires the free Adobe Reader.
Processes
- Negative Tone Lithography KMPR (PDF)
- PDMS and Soft lithography (PDF)
- Resist Evaluation for DRIE-Bosch (PDF)
Tool Rules
General Rules of Lab Tool Use | Qualifying Yourself to Use a Tool | Reporting Breakdowns
Research Equipment
Furnaces
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Vacuum Systems
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PhotolithographyPDFs require the free Adobe Reader.
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Mask Making
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Parametric Testing and Measurement
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Wet Chemistry
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Equipment in the Teaching Lab
See Teaching Assistants for help with these tools
Vacuum Systems |
Photolithography
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Parametric Testing and Measurement
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IMPORTANT!
Reporting Breakdowns
To report a possible equipment malfunction (contact information unavailable).
You have completed your notification responsibilities when either of these goals have been achieved:
- You have talked with one of the relevant people.
- You have attemped to contact all relevant people by e-mail or other message.
Note: PDF documents require the free Adobe Reader.