Equipment and Processes
The NCNC laboratory features equipment for the deposition of materials, lithography, etching, and inspection for micro- and nanosystem research and characterization. The laboratory also has a database of basic processes commonly used in the laboratory. Process information and equipment operation manuals are provided in the links below. If you are interested in a process beyond these standard procedures, talk to NCNC staff about what you need and we will try to accommodate your request.
Equipment
Lithography SystemsPDFs require the free Adobe Reader.
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Thin Film Systems
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Dry Etching Systems
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Metrology and Testing Systems
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Wet Benches
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Other Tools
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Processes
- SPR 220
- KMPR 1005 Negative Photoresist
- Lift-Off (PDF)
- PDMS Replica Molding
- Shipley 1813 Positive Photoresist
- SPR 955 CM0.7 Positive Resist
Note: PDF documents require the free Adobe Reader.