Documented Lab Manuals
Please return all manuals.
| Tool Name (manual description) | Manual Location |
|---|---|
| Thermco Furnace | No Manual |
MRL Furnace
| Room 2136 Kemper Hall backwall bookshelf under MRL Industries |
Technics PECVD
| Room 2136 Kemper Hall backwall bookshelf next to RIE manual |
Technics RIE
| Room 2136 Kemper Hall backwall bookshelf Under R and Website |
CHA E-Beam Evaporator
| Room 2136 Kemper Hall backwall bookshelf and Website |
| CHA MPS-4 Sputterer | Website |
Veeco Ion Mill
| Website |
| Technics Low Temp. Epi | In development |
| Plasma-Therm 790 Series | Room 1208 Kemper Hall |
Karl Suss Aligner
| Room 2136 Kemper Hall backwall bookshelf (orange binder) |
| Olypus Microscope | No manual |
| Nikon Micropattern Analyzer LAMPAS M-2 | Maintenance and Training Manuals with tool |
| Onosoki ST-022 | ? |
| Imperial IV Microprocessor Oven VWR 1330G Oven VWR 1410 Oven | No manual |
| Solitec Spinner | Room 2136 Kemper Hall backwall bookshelf |
| Headway Spinner | No manual Berkley Website (different brand) |
| Mask Making | Website |
Pattern Generator (red binders)
| Room 2136 Kemper Hall backwall bookshelf and Website |
| Semitool ST 2600 with TC-20 Resistivity Monitor Spin,rinse, and dryer for mask plates
| Room 2136 Kemper Hall backwall bookshelf (white binder) |
Veeco Dektak Profilometer
|
In lab next to tool |
Rudolph AutoEL Ellipsometer
| Room 2136 Kemper Hall file cabinets under R and Website |
| Scanning Electron Microscope Joel 848 | Behind microscope in IC lab |
| Zeiss Microscope with Nomarski Lens | No manual |
RCA Spin Rinser Dryer
| Room 2136 Kemper Hall backwall bookshelf under Semitool |
| All Purpose Rinser Dryer | ? |
| RCA Acid Bath RCA Base Bath Piranha Bath Nitride Etch Bath KOH Bath (Recirculating) Resist Strip Bath Lift-off Bath
|
Room 2136 Kemper Hall backwall bookshelf, Modutek (Spiral binder) |
| RCA Dump Rinser Nitride Dump Rinser KOH Dump Rinser Resist Dump Rinser
|
Room 2136 Kemper Hall backwall bookshelf, Modutek (Spiral binder) |
Ball Bonder
| Room 2136 Kemper Hall backwall bookshelf |
| Dicing Saw | Online Dicing Saw Operations Manual Service manual in Room 1125 |
| National Instruments General Purpose Wafer Bonding Tool Wire Bonder | ? |
| Canon 4" Aligner A Cannon 4" Aligner B
| Room 2136 Kemper Hall File Cabinets under "C" for canon and Website |
Solitec Resist Spinner and Hot Plate
|
Room 2136 Kemper Hall backwall bookshelf under Solitec(tan binders) |
RCA Spin Rinser Dryer
|
Room 2136 Kemper Hall backwall bookshelf under Semitool |
| Imp. IV Microprocessor Oven | No manual |
| Avateck Applied Materials Ellipsometer | Manual in lab next to tool |
| Philtec 2015 Sectioner "Groove and Stain" | Manual in lab next to tool Operating Instructions in EEC 146A Class Handbook |
| "CV Plotter": Micromanipulator Model 1847 with Bausch & Lomb Scope | ? |
| Four Point Probe | Operating Instructions in EEC 146A Class Handbook |
| Hot Probe | Operating Instructions in EEC 146A Class Handbook |
| Nomarski Microscope Optical Microscope | No manual |