Pattern Generator

(1) Convert L-Edit to a DWM before coming in.

(2) Check the Pattern Generator: (5 things to check)

-  No process is currently running

-  Laser is on (3 green lights, 1 yellow)

      -  Blue light (lamp) emitting near housing

-  Check logbook and write your name.

-  Check the console: Lamp supply, Stage control, & Aperture control (& H, W, A in up position) are on. (Do NOT turn on APC logic unit or Flash control)

(3) On the computer:

      - Get file:        

                  C:\JOBS> startftp      (actually telnet)

                  ALT-A

                  Telnet> snake (enter login & password) (return after colon)

                        ftp 169.237.74.18

                  ftp> put yourfile. DWM        (mput*.DWM for all)

                  ftp> quit                     (File is in C:\JOBS)

                  >exit

      - Convert file from a hexadecimal file to an ASCII file:

                  C:\JOBS> makefile *.DWM  (creates manntape. ASC & manntape. DIR)

      - Merge 2 files into one:

                  C:\JOBS> loadfile

                  Filename: manntape.dir

                  Filename: yourfile.dwm

                  Filename: <press enter to finish>

                              (File0 (manntape.dir).)

                              (File1 (yourfile.dwm).) (Make sure dots are there!)

(Creates two new files: GCA.TAP and GCA.TIX)  

      - Using simulator:

                  C:\JOBS> osprey  (pattern generator program)

                  Make sure CAPS lock is on.

                  >> MODE                  (changes mode)

                              Tape format: 1

                              Metric/English: M

                              FLASH/SHUTTER/LASER: S

                              APC/Manual Plate Changer: M

                              Execute option: 1

                              (Mode1MSM)

                  >> LF              (lists files)

                              (YOURFIES3636.T01 0088)

                  >> SETUP                  (makes a list of files)

                          (page 1)

                              Filename: #1                (position 1 of the list of files)

                              Exposure time: 75       (lookin log book to see new exposure time)

                              Execute option: 3        (go to page 2)

                                          (Typically, you don’t change anything on pages 2 and 3.)

                          (page 2)

                              Scale: 1,000

                              Low corner      x: -150 y: -150

                                                      x: 150              y:  150

                              Execute option: 3        (go to page 3)

                          (page 3)

                              Change plate: Y

                              Plate size         x: 127              y: 127

                              Execute option: 3        (goto page 4)

                              Barcode: <none>

                              Label: (enter any characters) (must be <= 32 characters)

                              With date and time: N

                              On Plate side: -Y

                              At distance from center (mm): -55   (puts it at the edge)

                              Mirrored? N

                              Execute option: 1                    (adds to queue)

                              Setup another job: N  (Y if you have morethan one file)

                  >>LQ              (listqueue)

                  >> TT             (testtape)   (Tests file to see if it is acceptable)

                  >> RQ             (runqueue)

                              Laser originates automatically.

                              Place mask with PR face up against pins (for 5 inch mask)

                              Turn vacuum on

                              If you get “focus lost” error try rotating the mask or (LO)

                              Control-P        (tells you how much time has passed)

                              Alt-C   (4)        (gets you back to DOS)

(4)Enter in the logbook your new time and # of exposures.

(5)Turn off the vacuum, take your mask, and place it in a transfer box cover.

(6) Develop mask

                  Put mask in the glass dish with MF319 developer

                  Should be about 1 min (check log book for correct developing time)

                  Rinse with DI water and dry with N2

(7) Use the microscope to check clarity of developed area of mask

(8) Chrome etch

                  Put mask in Teflon holder and place in chrome etch bath for about 1 min. (check logbook for the correct etching time)

(9) Again use microscope to check mask.

(10) Strip PR.

(11) REMEMBER TO CLEAN UP!

(12) Complete all entries in the logbook.

(13) On the computer make sure you delete your files from the JOBS directory (if you did not place them in your own directory).