Facility

Today

• 10,000+ square feet Class 100 Cleanroom in Kemper Hall
  
• Core Microfabrication equipment exists for
  
  • Photolithography
  • Etching
  • Deposition
    
  of semiconductors
  
• Staff: One engineer
  
• Recharge operation

New Facility

• Opportunity to create world-class facility for fabrication of nanoscale systems in areas from biotechnology to information technology
  
• What’s needed?
  
  • Leadership - A Faculty Director
    
    • Vision of interdisciplinary research using nanofabrication technologies
    • Outreach to campus faculty and industrial partners to establish new programs for the facility
    • Recruit a faculty director with
      • Research at the intersection of nanofabrication or MEMS technologies with areas such as biology/medicine.
      • Center management skills
  • Staffing
    
    • Critical to sustaining and maintaining facility operations including safety, equipment and infrastructure
    • Facility start-up commitment needed for 2 staff - an operations manager and an equipment manager - for a period of 3 years
      
  • Equipment
    
    • Some additional equipment to enhance capabilities in core fabrication areas particularly in the plasma etch area.
    • Equipment required for new areas such as nanobiotechnology
    • Installation and maintenance costs
• Goal - self-sustaining recharge facility in 3 years