Advanced Integrated Circuits Fabrication
Class Syllabus: EEC 146B
This is a sample syllabus from the Spring 1995 Quarter
Syllabus for the prerequisite: EEC 146A.
Required Material:
- Laboratory Handbook (at CopyLand: 231 G St.)
- VLSI Fabrication Principles, 2nd ed., by S. K. Ghandi (Wiley, 1994).
Grading:
- weekly labs (45%)
- weekly problems (15%)
- midterm & final exam (40%)
Class Flow:
Week 1
- Lecture: Gamma and Body Effect, Hall/VDP devices, Yield
- Lab: Parametric Testing and Process Monitoring
Week 2
- Lecture: Yield Modelling, Ion Implantation
- Lab: Yield Analysis and Yield Modelling
Week 3
- Lecture: Channelling, Skew-Gaussian
- Lab: Process Simulation using SUPREM - Athena
Week 4
- Lecture: C-V and C-t Analysis Techniques
- Lab: Sputter Liftoff Metallization of Process Monitiors
Week 5
- Lecture: Crystal Growth and Epitaxy, Midterm Exam
- Lab: C-V and C-t Static Analysis
Week 6
- Lecture: Vacuum Science, LPCVD Polysilicon, Nitride, and Oxide
- Lab: C-V Bias Temperature Stress Analysis
Week 7
- Lecture: Glow Discharges, Sputtering, Silicides
- Lab: Reactive Ion Etching, Step Profilometry
Week 8
- Lecture: Plasma Processing, RIE, Ion Milling
- Lab: Process Simulation Revisited
Week 9
- Lecture: Selective and Defect Etching, Micromachining
- Lab: Anisotropic and Selective Etching
Week 10
- Lecture: Direct Write, x-ray & e-beam Lithography
- Lab: Mask Making