Microfabrication
Class Syllabus: EEC 249
This is a sample syllabus from the Spring 1995 quarter.
Prerequisite:
Grad status in ECE, MS&E, Physics, ChE, DAS or permission
Required Material:
Physics of Micro/Nano-Fabrication, by Brodie and Muray (Plenum Press, 1992).
Grading:
Letter Grade:
- two takehome exams (60%)
- term paper (25%) and Presentation (5%)
- problem sets and participation (10%)
Class Syllabus:
Week 1
Fabrication Processes, Ion Sources
Ch. 1, Ch. 2.3
Week 2
Electron Sources, E-Guns, Electron Optics
Ch. 2.1-2.5
Week 3
Beam-Solid Interactions, E-Beam Lithography
Ch. 2.6-2.7, Ch. 5.3, 5.8
Week 4
X-ray Sources, X-ray lithography, Microscopy
Ch. 2.8, Ch. 5.6, Ch. 6.2-6.3
Week 5
Plasma Chemistry, Glow discharges
Ch. 3.7, 3.1-3.6
Week 6
Sputter techniques, Plasma processes, plasma-enhanced CVD, Reactive Ion Etching
Ch. 4.7, 4.9, 4.10, 4.13
Week 7
Epitaxy and CVD
Ch. 4.1-4.3, 4.14
Week 8
Evaporation and PVD
Ch. 4.6, notes
Week 9
Ion Milling, CAIBE, Characterization techniques
4.13, notes
Week 10
Term paper presentations