Microfabrication

Class Syllabus: EEC 249

This is a sample syllabus from the Spring 1995 quarter.

Prerequisite:

Grad status in ECE, MS&E, Physics, ChE, DAS or permission

Required Material:

Physics of Micro/Nano-Fabrication, by Brodie and Muray (Plenum Press, 1992).

Grading:

Letter Grade:

• two takehome exams (60%)
• term paper (25%) and Presentation (5%)
• problem sets and participation (10%)

Class Syllabus:

Week 1

Fabrication Processes, Ion Sources
Ch. 1, Ch. 2.3

Week 2

Electron Sources, E-Guns, Electron Optics
Ch. 2.1-2.5

Week 3

Beam-Solid Interactions, E-Beam Lithography
Ch. 2.6-2.7, Ch. 5.3, 5.8

Week 4

X-ray Sources, X-ray lithography, Microscopy
Ch. 2.8, Ch. 5.6, Ch. 6.2-6.3

Week 5

Plasma Chemistry, Glow discharges
Ch. 3.7, 3.1-3.6

Week 6

Sputter techniques, Plasma processes, plasma-enhanced CVD, Reactive Ion Etching
Ch. 4.7, 4.9, 4.10, 4.13

Week 7

Epitaxy and CVD
Ch. 4.1-4.3, 4.14

Week 8

Evaporation and PVD
Ch. 4.6, notes

Week 9

Ion Milling, CAIBE, Characterization techniques
4.13, notes

Week 10

Term paper presentations