Qualifying to Use Cleanroom Tools

The procedure for qualification and certification to use specific cleanroom equipment consists of the following three steps:

Step 1: Training

Learn the fundamentals, safety procedures, and operation of the equipment by reading the manuals (hard copies and on-line) and by receiving training from qualified users. The training includes (a minimum of) a session of observation with a user and a session of hands-on operation under the supervision of a user. Some pieces of equipment require an additional training session with a superuser. Except for training on these pieces of equipment, do not request basic training from a superuser unless no user is available to give the training within a reasonable time frame. Users are required to respond to requests for training in a timely manner. If a user feels that he or she is not qualified to, does not have the time to, or does not wish to train others, the user must rectify that situation or give up his or her user privilege. When the training is completed, the user verifies this by signing the certification form.

Note: During the training sessions the potential user is not to operate the equipment without the constant presence of a qualified user. Compliance with this rule is the responsibility of both trainer and trainee. Failure to comply will result in the immediate expulsion from the lab of both trainer and trainee till reinstated.

Step 2: Demonstration of completed training

After the training is completed, the person seeking user status contacts a superuser and sets a date for demonstration of proficiency. It is the responsibility of the potential user to reserve the equipment and bring the necessary supplies for the demonstration. If the potential user demonstrates satisfactory proficiency in the use of the equipment, the superuser signs the certification form. If not, the potential user goes back to step one.

Step 3: Final test and certification

Once the user and superuser have signed the certification form for the trainee, the potential user brings the form with the signatures to the lab manager and then completes a written test. Once the test has been passed, the lab manager enters the new user on the list of users for the equipment in question.

Certification form

Obtain the correct certification form from the Lab Manager. The purpose of the certification form is to verify that the correct certification procedure has been followed.

Written Test

The written test that completes the certification process will be an essay-style, "take-home" of about 30 minutes duration. The emphasis is on safe operation from the point of view of (1) user safety, (2) lab safety, and (3) equipment safety (e.g., Reactive Ion Etcher safety. The test for each piece of equipment will be written by the superusers and all tests will be given and graded by the lab manager.

Requirements for User Status

The superusers develop a list of requirements for user status on each piece of equipment. For most of the equipment the user will be required to be proficient in all aspects of the operation of that specific tool. For some very complicated systems, a user can be qualified on a subset of the total set of processes that can be done on the system. The policy concerning this will be set by the lab manager (with recommendations from the superusers) in advance and will not be subject to individual negotiation.

Superusers

It is the objective that each tool have several superusers. Any user can be nominated as a superuser by anybody at any time. The nomination will be considered by the lab manager who will grant or deny superuser status at his or her discretion. In the event of a denial, the faculty advisor of the individual requesting superuser status may appeal the decision to the lab manager who has final authority.

Equipment log

All the equipment in the lab have log books. It is the responsibility of the users to diligently report their use of the equipment in the log books. Any user that is found to violate the equipment-log policy will be expelled from the lab till reinstated by the lab manager.