Tool Status
| Tool | Status | Comments |
|---|---|---|
| 1246_fume_hood_acid | Available | |
| 1246_fume_hood_solvent | Available | |
| acid_base_fume_hood | Available | |
| alcatel_drie | Available | |
| atm_cvd_2 | Unavailable | Broken Thermcouple Sheath |
| atm_cvd_3 | Available | Temperamental Gas Control |
| atm_cvd_4 | Available | |
| canon_mask_aligner_1 | Available | |
| canon_mask_aligner_2 | Unavailable | More Repair parts received, in repair queue |
| cee_spinner | Available | |
| cha_ebeam_evaporator | Available | |
| cha_sputterer | Available | |
| dektak_3030_profilometer | Available | |
| dicing_saw | Available | See staff for blades |
| electroplating | Available | |
| evg_420_mask_aligner | Available | Front side alignment only, Contact staff to start lamp |
| fei_430_nanosem | Available | |
| hummer_x_sputter_coater | Available | |
| karl_suss_ma4_1 | Available | |
| karl_suss_ma4_2 | Unavailable | Parts on backorder |
| karl_suss_ma56 | Available | Room 1274, Contact staff to start lamp |
| Mann_3600F_pg | Available | |
| nanonex_nil | Available | |
| nanospec | Available | |
| plasma-therm_790_rie | Available | |
| rtp | Available | |
| rudolph_ellipsometer | Available | |
| solitec_spin_coater_research | Available | |
| solitec_spin_coater_teaching | Available | |
| solitec_vacuum_hotplate_research | Available | Chamber lift sticks first use after power on, no estimated time for repair |
| technics_pecvd | Unavailable | Attempting to locate parts |
| technics_rie | Available | |
| zeiss_photomicroscope | Available |